Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

摘要

We present a beam steering system based on micro-electromechanical systemstechnology that features high speed steering of multiple laser beams over abroad wavelength range. By utilizing high speed micromirrors with a broadbandmetallic coating, our system has the flexibility to simultaneously incorporatea wide range of wavelengths and multiple beams. We demonstrate reconfigurationof two independent beams at different wavelengths (780 and 635 nm) across acommon 5x5 array with 4 us settling time. Full simulation of the optical systemprovides insights on the scalability of the system. Such a system can provide aversatile tool for applications where fast laser multiplexing is necessary.